波长可变干涉滤波器及其制造方法、光模块及电子设备

Variable wavelength interference filter and method thereof, optical module, and electronic apparatus

Abstract

The invention provides a variable wavelength interference filter and a method thereof, an optical module, and an electronic apparatus. The variable wavelength interference filter includes a first substrate having a stationary mirror, a second substrate bonded to the first substrate and provided with a movable section and a movable mirror fixed to the movable section, and a third substrate bonded to the second substrate on an opposite side to the first substrate, and is provided with a first inner space sandwiched by the first substrate and the second substrate, a first gap, through which the first inner space communicates with the outside, a second inner space sandwiched by the second substrate and the third substrate, and a second gap, through which the second inner space communicates with the outside, and the first gap and the second gap are each sealed by a sealing member.
本发明提供了波长可变干涉滤波器及其制造方法、光模块及电子设备。波长可变干涉滤波器(5)具备:具有固定反射膜(55)的第一基板(51)、与第一基板(5)1接合且具备可动部(522)及固定于可动部(522)的可动反射膜(56)的第二基板(52)、以及在第一基板(51)的相反侧与第二基板(52)接合的第三基板(53),且波长可变干涉滤波器(5)还包括:通过第一基板(51)和第二基板(52)夹着的第一内部空间(581)、连通第一内部空间(581)和外部的第一间隙(591)、通过第二基板(52)和第三基板(53)夹着的第二内部空间(582)、连通第二内部空间(582)和外部的第二间隙(592),第一间隙(591)和第二间隙(592)通过密封材料(518)密封。

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